KLA-Tencor says its new WaferSight 2 is the industry’s first enabling wafer suppliers and chipmakers to measure bare wafer flatness
Posted date : May 14, 2008

KLA-Tencor says its new WaferSight 2 is the industry’s first enabling wafer suppliers and chipmakers to measure bare wafer flatness, shape, edge roll-off and nanotopography in a single metrology system for 45nm and beyond. SOI wafer-supplier Soitec was a beta site.

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