Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors
Posted date : Jul 30, 2009

www.engconfintl.org

5-10 July 2009, Xi’an, China

• High Scalability and Low Variability of Planar Fully Depleted SOI MOSFETS
  O. Weber (CEA-Leti)
• Substrate Engineering for 32nm and Beyond
  B.-Y. Nguyen, et al. (Soitec)
• SOI/Nanostructure Platform for Gas Sensing
  W. I. Milne, et al. (Cambridge U./UK; ETRI; Aixtron)