In the Lab

Suspended ring implemented as an oscillator mass sensor for label-free biological detection (Courtesy: CEA Leti)

“Currently at Leti, we use SOI in health-related research more for dimensional requirements than intrinsic electrical properties. For example, reproducibility in the cavity size (z-axis) is of prime importance for dilution and biological protocols. Some specific studies in capacitive detection, however, do leverage the electrical advantages of SOI.”

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